1990
|
Developed Impervious Graphite Device |
-Engineering Carbon
-Increases hardness |
1992
|
Developed SiC coating treatment technology on Graphite surface
|
-Prevents the oxidation of Graphite
-Increases hardness
-Increases purity |
1995
|
Developed SiC coating Heater and SiC coating Susceptor |
-Prevents the oxidation of Graphite
-Increases hardness
-Increases purity
--Heating high temperature |
1998
|
Developed SiC(Silicon Carbide) |
-Mechanical structure products
-Applied in Thermal/Semiconductor hardware Parts etc |
1999
|
Developed Carbon & Graphite density improving technology |
-Prevents the oxidation of Graphite
--Increases hardness |
1999
|
Developed Ga As deposited SiC coating Susceptor |
-Enhance CVD process
-Enhance thermal uniformity |
| 2001 |
Developed Crucible and Boat for Organic Electro-luminescent process |
-Enhance thermal uniformity |
