All electric resistance heating element for the generation of heat have different character of specific resistance, melting point, oxidation point, evaporation point, impurities contention by physical, electric, chemical character of using material.
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Metal heating element has difficult to get high temperature and temperature uniformity because of low melting point, corrosion at high temperature and uniformity of voltaic current, but on the other hand, SiC Heating Element is as an arsenic oxide has high temperature melting point more than 2,300กษ and strong matter for oxid corrosion.
So it's stable in the atmosphere and oxidation atmosphere with 1,700กษ and possible to heat more than 1,300กษ.
BN heater which is compared in the past, freaked with BN which is nonconductor on the graphite surface, so terminal connect part is exposed to oxidation, also the product which has problem to strong of product import from broad in a high price to use.
But, now SiC Solid Heater was developed by domestic and it is superior in quality to competition's product.
It is supplied with competitive price and used in semiconductor process under such condition as a corrosion inhibitor gas over 1,000กษ high temperature.
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